If the government makes clear criteria that any school whether religious (any religion) or not qualifies how is the governement establishing religion? Hypothetically, if vouchers are used at a Catholic school, a Jewish school, a Muslim school, a Mormon school, and some non-religious schools which religion is the government establishing? The message I would take is that the governement is not establishing any religion, rather the government is supporting education.
In any case, where do you draw the line? Can Catholic hospitals get federal money? They do. etc.